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Industrial inspection microscope

IM1000
IM1000

Industrial inspection microscope

Industrial inspection microscope is designed for the observation of large areas of samples in the industrial, electronic and instrument industries. Used for microelectronics and semiconductor inspection.

FEATURES

IM1000 Series:

1. High imaging reduction:

Kohler lens:Perfect microscopic illumination system——Kohler illumination, provides bright and uniform illumination throughout the viewing field. Coordinated with infinity optical system NIS45, high NA and LWD objective, perfect microscopic imaging can be provided.

NIS45 series objective:By adopting multi layer coating technology, NIS45 series objective lens can compensate spherical aberration and the chromatic aberration from ultraviolet to near infrared. The sharpness, resolution and color rendition of the images can be guaranteed. The image with high-resolution and flat image for various magnifications can be got.

2. More suitable for FPD and LSI sample:

Oversized stage:The areas of microelectronics and semiconductor samples tend to be large, so ordinary metallographic microscope stage cannot meet their observation needs. IM1000 has a oversized stage with a large movement range, and it is convenient and easy to move. So it is an ideal tool for microscopic observation of large area industrial samples.

Anti-static protective cover:Industrial samples should be far away of floating dust, and a bit of dust can affect product quality and test results. IM1000 has a large area of anti-static protective cover, which can furthest prevent from the floating dust and fall dust so as to protect the samples and make the test result more accurate. 

2

Longer working distance and high NA objective:All kinds  of electronic components and semiconductors make the circuit board samples have a larger difference in height. Therefore, special objective with long working distance are adopted in this microscope. Meanwhile, in order to satisfy the industrial  samples’high requirements on color reproduction, the apochromatic objective with high NA are adopted, which can restore the real color of samples.

3.Humanized design:

The focusing mechanism and fine adjustment handle of stage adopt the low hand position design, which conforms to the ergonomic design, and gives the greatest degree of comfortable feeling. The Ergo tilting viewing head can make the micro- observation work  more comfortable, so as to minimize the muscle tension and discomfort caused by long hours of work.

4.NOMIS Basic image processing system:

The software has various functions to satisfy your different image processing and analysis needs.

Multiple cameras are available to provide excellent microscopic photographing scheme.

The universal USB3.0 interface provides high-speed image transmission.

5.Imaging software for high-quality image acquisition, processing and analysis.

6.Cameras can be selected according to observation needs.

 

IM160 Series

1. Optional  6" or 10" wide range of stage;

2. 22mm field of view;

3. Five-port objective converter, a variety of objective to choose from;

4. Ergonomic design, comfortable operation, suitable for long time observation and inspection;

5. Modular design, bright field, dark field, differential interference, polarisation and other observation methods. It is an ideal tool for the QC and research of semiconductor devices, FPDs, electronic devices, materials, and precision mould manufacturing. 






SPECIFICATIONS

IMM1000 Series:

IM1000

Main Body

Optical system

 NIS45 Infinite optical system

Eyepiece

·SW10x(25) ·SW10X(22)
·EW12.5X(17.5) ·WF15X(16) ·WF20X(12)

Focusing system

Coaxial focusing mechanism with low position

With height stop loop,slack adjuster and left to right micromotion handwheel exchange mechanism

Focusing range 32mm, Fine-tuning lattice value 1µm

Eyepiece Tube

·Siedentopf trinocular viewing head
 Eyepiece/port:100/0、20/80、0/100
Depression angle:30 degrees,pupil distance adjustment range:47-78mm
·Ergo tilting trinocular viewing head
Eyepiece/port:100/0、20/80、0/100
Depression angle:0-30°,
pupil distance adjustment range:47-78mm


Nosepiece

Sextuple nosepiece for bright and dark field, with DIC slot (Auto)

Stage

 Large Stage 14” x 12”
 Range: 356 x 305 mm
 (Lighting area for transmitted light:356 x 284 mm)
 It can be used for 300mm wafers,attached is the sample bracket.

Condenser

Transmitted illumination with condenser

Observation
methods

EPI illumination

Bright field ,dark field ,DIC, simplified polarized, and fluorescent

Trans illumination

 Bright field, simplified polarized light

 

IM160 Series


 IM160A

 IM160B

Optical System

Infinity Optics

Eyepieces

EW10X(22)

Viewing Head

Trinocular Head

Converter

Quintuple Nosepiece

Objective

Plan Achromatic Objective
(bright field objective, light and dark field objective, transmission objective, reflection objective)

Infinite Plan Achromatic Objective

4X/0.10/ ∞/ -  

WD17.8mm

5X0.12/ ∞/ -    WD15.5mm

10X/0.25/ ∞/ - (BF/DF)  

WD10.0mm

10X/0.25/ ∞/ -

WD10.0mm

20X/0.4/ ∞/ 0  (BF/DF)  

WD4.3mm

20X/0.40/ ∞/ 0 (BF/DF) WD5.8mm

50X/0.75/ ∞/ 0 WD 0.32mm

40X/0.60/ ∞/ 0  

WD2.9mm

100X/0.80/ ∞/ 0 WD 2.00mm

Stage

-10-inch    -Size 300mm×268mm    -Movement range 250mm×250mm

Reflected Light Source

24V/100W halogen lamp, Brightness adjustable

Focusing

Coaxial coarse and fine adjustment, Range 24mm

Expansion

Bright Field, Dark Field, Polarisation, DIC


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